Features | Electric Linear Slide EZS Series for Clean Room Use

The EZS Series products for clean room use have the same functions and performance as the EZS Series, but are now for clean room use.

Refer to here for details on the EZS Series with a simple dust-resistant structure (not compatible with cleanroom).

For Clean Room Use (ISO Standards Cleanliness Class 3)

With the low dust-generative roller structure and clean grease, the cleanliness class of ISO Standards Class 3^* (equivalent to FED Standard Class 1) has been achieved.

• *About ISO Standards Class 3

Uses Low Dust-Generative Clean Grease

Low dust-generative clean grease is used on the ball screw, guides, bearing etc.

Cleanliness class of Class 3 is Achieved With Minimum Suction

For example, EZSM3 can achieve the cleanliness class of ISO Standards Class 3, with a minimum internal suction volume of approximately 20 ℓ/min.

• *For the correlation diagram of particle generation amount and suction volume for EZSM4 and EZSM6, refer to here

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• The slim type is only compatible with EtherCAT. For more details, please contact your nearest branch, sales office, or Customer Support Center.

• *EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
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